Skip to content

Combined Mode of Vibration Aluminum Nitride Micro-Electro-Mechanical Resonator with High Electromechanical Coupling Coefficient

Thin film AlN MEMS resonators that exhibit high frequency, high quality factor and high electromechanical coupling coefficients

Published: 1st January 1970
Combined Mode of Vibration Aluminum Nitride Micro-Electro-Mechanical Resonator with High Electromechanical Coupling Coefficient
Fontanis, stock.adobe.com
IP Status
  • Patent application submitted
Seeking
  • Development partner
  • Commercial partner
  • Licensing